室温工作的低成本氧化钒红外焦平面器件  

UNCOOLED VO_2 IR FOCAL PLANE ARRAY DEVICE

作　　者：田种运[1] 雷胜琼[1] 孙娟[1] 

机构地区：[1]昆明物理研究所,昆明650223

出　　处：《红外与激光工程》1998年第5期32-35,共4页Infrared and Laser Engineering

摘　　要：文章给出了氧化钒焦平面器件的基本工作原理、设计思想、关键工艺、应用前景、现在已经达到和将来可能达到的性能指标,指出本器件是军民两用的低成本器件。The fundamental principle, design, key technology and prospects of the VO_2 thermal sensitive resistor FPA are discussed. The responsivity and detectivity of the devices are of 5×10~5V/W and 1.8×10~9cmHz^(1/2)/W, respectively. The NETD is 0.04℃. The detectors have no cross talk, low power consumption and high reliability. Because it can be mass-produced and operated under room temperature, it is going to be vital IRFPA for military and civil applications.

关 键 词：红外焦平面阵列 热敏电阻 二氧化钒 

分 类 号：TN216[电子电信—物理电子学] TN37