导模共振滤光片表面镀膜对其物理特性的影响  

Influence of Film on the Characteristics of Sub-Wave Grating

作　　者：张大伟[1] 袁丽萌[1] 黄元申[1] 倪争技[1] 陈麟[1] 朱亦鸣[1] 庄松林[1] 

机构地区：[1]上海理工大学上海市现代光学系统重点实验室,上海200093

出　　处：《中国激光》2009年第11期3060-3063,共4页Chinese Journal of Lasers

基　　金：国家科技部支撑计划(2006BAK03A03);上海市科委(07DZ22026;08ZR1415400;08DZ2272800)资助课题

摘　　要：为了研究亚波长光栅表面上薄膜的生长特性,以及镀膜对亚波长光栅物理特性的影响,对亚波长正弦槽形光栅表面上镀的Au膜进行了实验研究和理论分析。实验发现,当光栅槽深为80nm,Au膜为100nm时,薄膜的生长是仿形生长,光栅的正弦槽形特征和周期都基本没有发生变化,但镀膜后,出现光栅的正弦占空比增加、槽的深度减小以及槽深的均匀性变差等现象。对引起这种现象的原因进行了分析,提出了由于光栅微结构而给薄膜生长带来的阴影效应现象,并分析了正弦占空比增加对导模共振滤光片光谱特性的影响。To study the influence of film on the characteristics of subwavelength grating,the growth of 100 nm Au film on the surface of subwavelength grating with sine groove shape and 80 nm groove depth was investigated. It was shown that the growth was profiling copy,the sine groove and periodic were keep unchanged almost. When sine duty cycle increased,the groove depth reduced and uniformity of groove depth got worse. The shadow effect generated by the microstructure of grating was proposed to explain these variations. The effect of sine duty cycle increasing on the spectrum of guided mode resonant filters was investigated too.

关 键 词：薄膜 亚波长光栅 薄膜生长 占空比 正弦槽形 导模共振 

分 类 号：TB43[一般工业技术] O484.1[理学—固体物理]