均匀载荷作用下膜基反射镜面形分析和研究  

Analysis and research on the shape of membrane mirror applied by uniform load

作　　者：陆丽娟[1] 张庚生[1] 唐敏学[1] 

机构地区：[1]江苏省现代光学技术重点实验室,苏州大学信息光学工程研究所,江苏苏州215006

出　　处：《苏州大学学报（自然科学版）》2009年第4期53-58,共6页Journal of Soochow University(Natural Science Edition)

基　　金：国家自然科学基金资助项目(60678051);江苏省现代光学技术重点实验室开发课题

摘　　要：基于Sergey A. Dimakov提出的薄膜模型解以及有限元分析方法,对口径为300mm、不同F数的聚酰亚胺薄膜进行均匀载荷作用下的变形研究和分析.结合像差理论,将有限元分析得到的离散数据拟合出37项标准Zern ike项系数,由此可将成形后膜基反射镜的各项像差分离出来.计算和分析结果表明,在均匀载荷作用下膜基反射镜的像差主要是球差.对于同一口径的膜基反射镜而言,随着F数的增大,球差逐渐变小.这为进一步开展膜基反射镜的成形和面形控制实验提供了理论依据.Based on Sergey A. Dimakov＇s membrane theory and finite element method, the shapes of membrane mirrors with a diameter of 300mm and different F numbers applied by uniform load are studied. 37 Zernike coefficients are achieved by fitting the discrete data got from the analysis result of finite element method. These Zernike coefficients correspond to the aberrations of the shaped membrane mirror and each kind of aberration can be separated according to the relationship between Zernike coefficients and aberrations. The calculation and analysis results show that the main aberration of the shaped membrane mirror applied by uniform loads is the spherical aberration. For the membrane mirror with same aperture, the larger the F number is,the less the spherical aberration will be. The research results supply a foundation for further design and shape control of membrane mirrors.

关 键 词：膜基反射镜 有限元分析方法 ZERNIKE多项式 像差 

分 类 号：TH751[机械工程—仪器科学与技术]