GaAs光电阴极智能激活研究  

Fabrication and Auto-Activation of GaAs Photocathode

作　　者：杨智[1] 牛军[1] 钱芸生[1] 常本康[1] 石峰[1,2] 张益军[1] 乔建良[1] 熊雅娟[1] 高频[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,南京210094 [2]西安应用光学研究所微光夜视技术国防科技重点实验室,西安710065

出　　处：《真空科学与技术学报》2009年第6期669-672,共4页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(No.60678043;60801036)资助

摘　　要：研制了一套基于计算机控制的GaAs光电阴极智能激活系统,该系统可在计算机控制下严格按照标准工艺对GaAs光电阴极进行智能激活,并可在线测量阴极的光谱响应曲线。利用该系统分别进行了智能激活和人工激活实验,采集了激活过程中的光电流变化曲线,分析发现,和智能激活过程相比,由于人工激活过程出现了误操作,相邻光电流峰值间的差值下降很快,Cs、O交替的次数也较少。人工激活过程中Cs、O交替6次,光电流最大值为43μA,激活后GaAs光电阴极的积分灵敏度为796μA/lm。智能激活过程中Cs、O交替9次,光电流最大值为65μA,激活后GaAs光电阴极的积分灵敏度为1100μA/lm。The computer-automated system has been successfully developed to intelligently activate the GaAs photocathode by the standardized activation technique and to evaluate in-situ the spectral response. The time evolutions of the photocurrent during both the manual activation and auto-activation with the system were compared. The comparisons show that the auto-activation outperforms the manual activation. In the manual-activation,the photocurrent increases more slowly,the peak photocurrent decreases faster,and the （Cs,O） alternation number is fewer as compared with the auto-activation, possibly because of some mis-operation. For instance, in manual activation of the GaAs photocathede, we observed the （Cs, O） alternation number of 6, a peak photocurrent of 43μA and an integrated sensitivity of 796μA/lm; whereas in auto-activation, the （Cs, O） ahemation number of 9, a peak photocurrent of 65μA and an integrated sensitivity of 1100μA/lm.

关 键 词：GAAS光电阴极 智能激活 光电流 光谱响应 

分 类 号：TN15[电子电信—物理电子学] TN91