Micro-structure sensors based on ZnO microcrystals with contact-controlled ethanol sensing  

作　　者：LIU Li ZHANG Tong LI ShouChun WANG LianYuan TIAN YunXia 

机构地区：[1]College of Physics, Jilin University, Changchun 130012, China [2]National Laboratory of Superhard Materials, Jilin University, Changchun 130012, China [3]State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012. China

出　　处：《Chinese Science Bulletin》2009年第23期4371-4375,共5页

基　　金：Supported by the National Natural Science Foundation of China (Grant No. 10672139)

摘　　要：ZnO microcrystals are synthesized through a facile solution method and characterized by field-emission scanning electron microscopy, transmission electron microscopy, selected area electron diffraction and X-ray diffraction. The ethanol sensing properties of these microcrystals are investigated by spin-coating them on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensitivity is up to 8 when the sensor is exposed to 50 ppm ethanol, and the response time and recovery time are 10 s and 20 s, respectively. A contact-controlled model is established to explain the sensing properties of the microcrystals, which provides another approach to realize high-performance gas sensors.ZnO microcrystals are synthesized through a facile solution method and characterized by field-emission scanning electron microscopy, transmission electron microscopy, selected area electron diffraction and X-ray diffraction. The ethanol sensing properties of these microcrystals are investigated by spin-coating them on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensitivity is up to 8 when the sensor is exposed to 50 ppm ethanol, and the response time and recovery time are 10 s and 20 s, respectively. A contact-controlled model is established to explain the sensing properties of the microcrystals, which provides another approach to realize high-performance gas sensors.

关 键 词：结构传感器 微晶涂层 控制模型 氧化锌 乙醇 感应 基础 选区电子衍射 

分 类 号：TN16[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]