基于(100)定向金刚石薄膜的辐射探测器研究  

Research for (100)-Oriented Diamond Film Radiation Detector

作　　者：沈沪江[1] 王林军[1] 黄健[1] 徐闰[1] 史伟民[1] 夏义本[1] 

机构地区：[1]上海大学材料科学与工程学院,上海200072

出　　处：《无机材料学报》2009年第6期1254-1258,共5页Journal of Inorganic Materials

基　　金：国家自然科学基金(60877017);长江学者和创新团队发展计划(IRT0739);上海市教委创新科研项目(08YZ04);上海市重点学科(S30107)资助

摘　　要：采用微波等离子体化学气相沉积(MPCVD)方法制备了100μm米厚高质量(100)定向金刚石薄膜.利用(100)定向金刚石薄膜成功制备了α粒子探测器,-100V偏压下电荷平均收集效率为37.7%,最大的电荷收集效率达到60%以上.在此基础上,通过在α粒子探测器条状电极面蒸镀一层合适厚度的硼(10B)膜转化层,成功研制了金刚石中子探测器.镀硼之后探测器对中子有明显的响应,在1V/μm电场下,对252Cf中子的能量分辨率达到9.3%,探测效率达到1.67%.同时还研究了电场强度和硼(10B)层厚度对器件探测效率的影响规律.在厚度<1.5μm时,随着厚度的增加,探测效率上升,当厚度>1.5μm时,探测效率下降.High quality（100）-oriented diamond film was prepared by Microwave Plasma Chemical Vapor Deposition（MPCVD） with thickness of 100μm.A α particle detector was successfully made on the prepared film.The charge collection efficiency is 37.7% under-100V bias in average while the maximum reaches 60%.On the basis of this,diamond neutron detector is successfully developed by evaporating a layer of 10B converter with a proper thickness on the surface with an evidently increased response to α particle.At the electric field of 1V/μm,the energy resolution is 9.3%,the detecting efficiency to 252Cf neutron is 1.67%.Electric field and converter thickness have influences on the detecting efficiency.With the converter thickness increasing,the detecting efficiency increases,when the thickness reaches 1.5μm,the deteting efficiency turn to decrease.

关 键 词：金刚石薄膜 辐射探测器 光电性能 

分 类 号：TQ174[化学工程—陶瓷工业]