金属盐掺杂介孔二氧化硅SBA-15的湿敏特性研究  

Study on Humidity Sensing Property of Metal Salt Doped with Mesoporous Silicon SBA-15

作　　者：贺媛[1] 王蕊[1] 张彤[1] 

机构地区：[1]集成光电子学国家重点联合实验室吉林大学实验区,吉林大学电子科学与工程学院,吉林长春130012

出　　处：《仪表技术与传感器》2009年第B11期102-104,111,共4页Instrument Technique and Sensor

基　　金：国家杰出青年基金(60625301)

摘　　要：用模板法合成了介孔二氧化硅SBA-15,为了改善其湿敏特性进行了金属盐掺杂。通过扫描电子显微镜(SEM)和XRD对纯质介二氧化硅SBA-15以及不用金属盐掺杂材料的形貌和结构进行了表征。在11%RH到95%RH的范围内研究了纯SBA-15和不同金属盐掺杂SBA-15材料的湿敏特性。结果表明:适量的金属盐掺杂能很好的提高了介孔硅SBA-15材料的湿敏特性。不同金属盐掺杂SBA-15材料的响应恢复时间也比较迅速,响应时间都在60 s以内,而恢复时间都在180 s以内,能够满足湿度传感器的应用需要。The mesoporous silica SAB - 15 material was synthesized by template method. Metal salt were doped in order to improve the humidity sensing properties of the material. The microstructure and morphology of materials were characterized by scanning electron microscope （SEM） and XRD. Humidity sensing properties of pure SBA -15 and metal salt doped SBA -15 were studied from 11% RH to 95 % RH. The results show that appropriate metal salt doped could improve the humidity sensing properties of pure SBA - 15 clearly. The response and recovery time of metal salt doped materials are quite quickly, the response time are all less than 60 s and recovery time are all less than 180 s. All these parameters have achieved the practice application standard.

关 键 词：湿敏特性 介孔材料 SBA-15 LICL K_2CO_3 

分 类 号：TN389[电子电信—物理电子学]