与气相色谱仪联用的声表面波传感器  

A SAW Gas Sensor in Conjunction with the Use of Gas Chromatography

作　　者：李顺洲[1] 朱佐刚[2] 刘久玲[1] 刘明华[1] 胡玢[2] 何世堂[1] 

机构地区：[1]中国科学院声学研究所,北京100190 [2]北京市劳动保护科学研究所,北京100054

出　　处：《仪表技术与传感器》2009年第B11期121-122,126,共3页Instrument Technique and Sensor

基　　金：国家‘863'高技术研究发展计划课题(2006AA06Z413)

摘　　要：文中介绍了一种与气相色谱仪联用的声表面波气体传感器。传感器由声表面波谐振器作反馈单元的振荡器和半导体制冷器组成。谐振器采用ST-X石英压电基片上双端对谐振式结构,Q值高(1 896)、插入损耗低(4.7 dB)。采用在最低损耗点进行相位匹配以改善振荡器短期频率稳定度的方法,其短期频率稳定度达到了11 Hz/s(10^(-8)量级)。与气相色谱联用的气体检测试验给出对苯蒸气的检测下限约为150 ppb.A surface acoustic wave（SAW） gas sensor in conjunction with the use of gas chromatography （GC） was reported in this paper,which was composed of a SAW oscillator and a semiconductor refrigerator. The two-port SAW resonator on ST- X quartz substrate was fabricated as the feedback element of the SAW oscillator. High Q-value （ 1 896）, low insertion loss of 4.7dB was observed in the measured frequency response of the fabricated SAW device. The measured frequency stability of the SAW oscillator was up to 11 Hz/s（ magnitude order of 10 ^-8 ）. The threshold detection limit in the benzene vapor sensing experiment combining the SAW gas sensor and GC was around 150 ppb.

关 键 词：声表面波 传感器 气相色谱仪 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]