平面型无阀微泵流固耦合模态分析  

Modal Analysis of Liquid-solid Coupling System of Flat-walled Valveless Micropumps

作　　者：李俊[1] 应济[1] 沈雪明 徐亮[1] 

机构地区：[1]浙江大学机械工程学系,杭州310027 [2]浙江申达机械制造有限公司,杭州310038

出　　处：《机械科学与技术》2009年第12期1604-1607,1612,共5页Mechanical Science and Technology for Aerospace Engineering

基　　金：浙江省自然基金重点项目(Z106519);国家自然科学基金项目(50475104)资助

摘　　要：为研究平面型无阀微泵工作时的振动特性,分析了湿模态法提取泵膜流固耦合模态的过程,并利用ANSYS建立了泵膜-腔内流体耦合的有限元模型,通过结构模态分析中的非对称法提取了泵膜的无阻尼湿模态,得到了微泵结构尺寸和腔内流体压力对泵膜湿模态的影响。结果显示,湿模态频率相对干模态频率有大幅度地下降,振型类似;湿模态频率随着泵腔高度的增加而逐渐增大;在微泵工作压力范围内,腔内流体压力对湿模态没有影响。To investigate the vibration characteristics of valveless micropumps, the liquid-solid coupling mode of micropump membrane was extracted by the wet modal method ignoring the influence of damping. A finite element model for liquid-solid coupling system was built with software ANSYS, and the wet mode of the membrane was extracted using unsymmetric method of structural modal analysis. The effects of geometric parameters and fluid pressure on the membrane wet mode were investigated. It shows that the frequency of the wet mode is much lower than that of the dry mode, but the mode shapes are similar. The higher the micropump chamber, the greater the influence on the wet mode in a certain range. The fluid pressure of the pump chamber has little effect on the wet mode.

关 键 词：无阀微泵 流固耦合 湿模态 模态分析 有限元法 

分 类 号：TH323[机械工程—机械制造及自动化] O361.4[理学—流体力学]