横向场压电液相传感器测量方法的研究  

Study on the Method for Measuring Lateral-field-excitation Piezoelectric Sensors for Liquid Application

作　　者：王文炎[1] 张超[2] 张志甜[1] 刘岩[2] 冯冠平[1,2] 敬刚[2] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084 [2]深圳清华大学研究院信息与光机电研究所,广东深圳518057

出　　处：《压电与声光》2009年第6期862-864,867,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60571014)

摘　　要：研究了横向场压电液相传感器的串联谐振频率、动态电阻、机械品质因数等特性参数的测量方法。采用自动调制电容补偿技术对静态电容进行了有效补偿,保证了串联臂特性的检测;同时结合直接数字式频率合成器(DDS)技术,实现了半功率点法对机械品质因数的测试。实验结果表明,该方法测量的动态电阻范围大(达到5kΩ),稳定性较高。A novel method was studied for measuring the series resonant frequency,motional resistance and mechanical quantity factor of the lateral-field-excitation （LFE） piezoelectric sensor for liquid application. An automatic modulated capacitance compensation technique was used for compensating the static capacitance to insure that the measured frequency,resistance and quantity factor correspond to the true series resonant parameters of the sensors. And with the DDS （Direct Digital frequency Synthesizer） incorporated,the mechanical quantity factor was obtained by using the half-power-point technique. The experimental results showed that a wide measuring range of the motional resistance （up to 5 kΩ） and a high measuring stability can be achieved by using the method.

关 键 词：横向场激励 压电传感器 自动调制电容补偿 半功率点法 

分 类 号：TN384[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]