Design of an ultra-compact 3 dB MMI coupler  

作　　者：陈媛媛 杨笛 余金中 孙梅 邢素霞 

机构地区：[1]College of Computer and Information Engineering,Beijing University of Technology and Business [2]College of Science,Central University for Nationalities [3]State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences

出　　处：《Optoelectronics Letters》2009年第6期427-429,共3页光电子快报（英文版）

摘　　要：The design of an ultra-compact SOI-based 1×2 3 dB multimode interference(MMI) coupler is proposed.The symmetric multimode interference structure and deeply-etched parabolically tapered multimode waveguide are used in the device.The length of the device is reduced by about 87% compared with general multimode interference straight couplers.Based on effective index method(EIM) and two dimensional beam propagation method(2D-BPM),the structure parameters are optimized and the fabrication tolerances are analyzed.The results indicate that the performance of the coupler is deeply affected by the coupler's width,etching depth and photolithography alignment error in perpendicular direction.The design of an ultra-compact SOI-based 1×2 3 dB multimode interference（MMI） coupler is proposed.The symmetric multimode interference structure and deeply-etched parabolically tapered multimode waveguide are used in the device.The length of the device is reduced by about 87% compared with general multimode interference straight couplers.Based on effective index method（EIM） and two dimensional beam propagation method（2D-BPM）,the structure parameters are optimized and the fabrication tolerances are analyzed.The results indicate that the performance of the coupler is deeply affected by the coupler＇s width,etching depth and photolithography alignment error in perpendicular direction.

关 键 词：耦合器 MMI 超小型 分贝 设计 多模波导 多模干涉 结构参数 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术]