等离子体MEMS红外光源研究进展  

Research Developments in Plasmonic MEMS Infrared Light Source

作　　者：肖功利[1,2] 姚翔[1] 纪新明[1] 周嘉[1] 包宗明[1] 黄宜平[1] 

机构地区：[1]复旦大学微电子学系ASIC与系统国家重点实验室,上海200433 [2]桂林电子科技大学信息与通信学院,广西桂林541004

出　　处：《激光与光电子学进展》2009年第12期38-45,共8页Laser & Optoelectronics Progress

基　　金：国家科学基金项目(90607015);教育部博士研究生基金资助项目(20070246099)

摘　　要：利用金属/电介质光子晶体(MDPC)对黑体热辐射光谱有增强透射和滤波的剪裁特性,制成能够发射出高性能、可调谐窄带相干光的等离子体微机电系统(MEMS)红外光源。其工作波长可选择性、工艺简单、成本低和MEMS化等优点使其在生物、医学和军事等领域得到广泛的应用。对该器件的结构与材料选择、工作机理、工艺流程及性能表征和研究进展进行了详细的综述,对其在微型非色散红外(NDIR)气体传感系统中的应用前景进行了展望。The plasmonic microetectromechanical systems （MEMS） infrared light sources, which can emit high performance, tunable narrowband, and coherent light are fabricated by using tailor-made properties of metal/dielectric photonic crystals （MDPC） which can enhance the blackbody radiation spectrum transmission and filtering. The advantages of infrared light source like alternative work wavelength, simple process, low-cost and MEMS systematization bring it a wide application in biological, medical and military fields. The structure, material selection, working mechanism, technologic process, performance characterization and research progress of the device are summarized in detail, and the application prospect for miniature non-dispersive infrared （NDIR） gas sensing system is viewed.

关 键 词：光学器件 金属/电介质光子晶体 二维金属亚波长孔阵列 表面等离子体 黑体辐射 

分 类 号：O539[理学—等离子体物理] O439[理学—物理]