太阳能级硅高效放电电解复合切割制绒一体化研究  

Research on Compound EDM & ECM Cutting Integrating with Texturing on Solar Wafer

作　　者：刘志东[1] 邱明波[1] 汪炜[1] 田宗军[1] 黄因慧[1] 

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《电加工与模具》2009年第6期18-22,共5页Electromachining & Mould

基　　金：江苏省高技术研究计划资助项目(BG2007004)

摘　　要：提出了一种基于复合工作液的以电火花电解复合加工技术对太阳能级硅进行切割及制绒一体化的新方法。试验表明,用高速走丝电火花线切割(HSWEDM)加工太阳能级硅切割效率高、厚度薄、切缝窄。具有表面可直接形成绒面结构、无明显微裂纹且获得的绒面反射率在全光谱波段内光反射率较低的特征。该工艺方法为探索缩短太阳能电池制造流程,降低硅片加工成本,提高硅材料利用率,促使硅太阳能电池成本显著降低,并形成具有我国自主知识产权的太阳能级硅片切割制绒一体化技术提供了理论及实践依据,为我国电火花线切割的应用开拓了新领域。A new technology cutting with synchronizing texturing on solar wafer is researched, which is based on complex dielectric fluid and using compound electric discharge machining（EDM） and electrochemical machining（ECM） technique. The results show that wire cut electric discharge machining with high traveling speed（HSWEDM） process on solar wafer has high efficiency, thin thickness, narrow cutting gap and forming texturization on surface directly, as well as few or no surface microcracks and the reflectivity of texturization has a low reflection characteristic in full range spectrum. The technique gives a potential way to cut the fabrication processes of solar cell, reducing silicon cut costs and improving utilization of silicon, reducing the cost of manufacture significantly , and it provides a theoretical and practical basis on China＇s independent intellectual property of WEDM and etching integration technology for solar-grade silicon machining, extend new fields for China＇s WEDM applications.

关 键 词：太阳能硅片 电火花加工 电解加工 切割制绒一体化 复合工作液 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]