甲苯传感器的制作及特性  

Fabrication and Characteristics of toluene Sensor

作　　者：钟铁钢[1] 梁喜双[1] 刘凤敏[1] 全宝富[1] 

机构地区：[1]集成光电子国家重点实验室吉林大学实验区吉林大学电子科学与工程学院,长春130012

出　　处：《功能材料与器件学报》2009年第6期554-558,共5页Journal of Functional Materials and Devices

基　　金：国家自然科学基金项目资助(编号:60574096);国家杰出青年基金(60625301);吉林大学"985工程"研究生创新基金资助项目(20080221)

摘　　要：采用溶胶-凝胶法制备了NASICON(钠超离子导体)固体电解质材料。利用XRD分析了所制备材料的结构,材料的平均粒径约为22nm。以NASICON为离子导电层,Sm2O3为敏感电极制作了具有良好敏感特性的C7H8气体传感器。在430℃工作温度下,器件对(5-50)×10-6C7H8的灵敏度为-75mV/decade。并且对C7H8具有较高的选择性和良好的响应恢复特性,器件对5×10-6和50×10-6C7H8的响应时间分别为45和35秒,恢复时间分别为8和60秒。对器件的敏感机理做以简要的分析。NASICON（sodium super ionic conductor） solid electrolyte was prepared by sol- gel method. The structure of the material were analysized by XRD and mean grain size was 22nm. A toluene gas sen- sor with well sensing performance was fabricated using NASICON as the Ion conductive layer and samari- um oxide as the sensing electrode. The sensitivity of the sensor to （5 -50） ×10^-6 toluene was -75mV/ decade at the operating temperature of 430℃, In addition, the sensor exhibited high selectivity and well response - recovery characteristic to toluene. The response time of the sensor to 5 ×10^-6 and 50 ×10^-6 toluene was 45 and 35 s, the recovery time was 8 and 60 s. The sensing mechanism of the sensor was in- vestigated briefly.

关 键 词：气体传感器 钠超离子导体 甲苯 氧化钐 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]