An Indirect Method for Measuring Electron Density of Atmospheric Pressure Plasma Jets  

作　　者：刘莉莹 张家良 王德真 

机构地区：[1]School of Physics and Optoelectronic Technology,Dalian University of Technology

出　　处：《Plasma Science and Technology》2009年第6期693-698,共6页等离子体科学和技术（英文版）

基　　金：supported by National Natural Science Foundation of China(Nos.10775026,50537020,50528707)

摘　　要：An indirect method for measuring the electron density of radio frequency atmospheric pressure plasma jets （RF-APPJ） based on the discharge voltage and current waveforms is presented. An equivalent circuit of the plasma discharge is assumed by taking into account the electrode capacitance, serial resistance and inductance of the bulk plasma, as well as the sheath impedance. Based on the circuit model, the electron density can be obtained according to Ohm＇s law. By using this method, the effects of the electrode shape and discharge gap on the electron density are discussed.An indirect method for measuring the electron density of radio frequency atmospheric pressure plasma jets （RF-APPJ） based on the discharge voltage and current waveforms is presented. An equivalent circuit of the plasma discharge is assumed by taking into account the electrode capacitance, serial resistance and inductance of the bulk plasma, as well as the sheath impedance. Based on the circuit model, the electron density can be obtained according to Ohm＇s law. By using this method, the effects of the electrode shape and discharge gap on the electron density are discussed.

关 键 词：atmospheric pressure plasma jets radio frequency discharge electron density 

分 类 号：O539[理学—等离子体物理]