ZF6重火石玻璃非球面数控加工技术的研究  

Investigation on the computer controlled fabrication of ZF6 dense flint glass aspheric surface

作　　者：苏佳妮[1] 付秀华[1] 李珊[1] 牟光远[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《光学仪器》2009年第6期76-80,共5页Optical Instruments

基　　金：广东省科技厅科研资助项目(2007A090302007)

摘　　要：由于重火石玻璃的密度很大,材料较软,在数控加工过程中难以控制材料的去除量。现主要针对Φ62mm ZF6非球面凸透镜,对铣磨成型工艺、抛光工艺、抛光设备及抛光液等相关工艺参数进行了研究,采用弹性模预抛光与小抛头修正抛光相结合的两步研抛法对零件表面快速抛光,给出了一套规范的ZF6玻璃非球面的数控加工工艺,同时保证了零件具有较高的面形精度,实现了该非球面元件的快速批量生产。Φ62mm口径非球面最终面形精度达到0.5μm以下,表面光洁度达到Ⅲ级,明显改善成像质量,减少系统中光学零件数目,满足了非球面的使用要求。Heavy flint glass with big density and soft feature, consequently it is hard to control the material removal capacity in CNC processing. This paper is mainly about the fabrication technology of the Ф2mm ZF6 aspheric lens, including grinding process, polishing process, polishing equipment, polishing tool, abrasives used in the polishing and other processing parameters. Two-step polishing process is combined with pre-polishing and corrective polishing. Standard computer controlled fabrication technology for ZF6 aspheric surface is supplied, it meets the required surface error. The method supply a rapid production for aspheric. The final surface error of the Ф52mm aspheric surface is under 0. 5μm in the experiments. The surface finish is Ⅲ. The aspheric component could reduce the number of elements, thus form good images quality and meets the using requirements in the optical system.

关 键 词：先进光学加工技术 非球面 数控抛光 小磨头修正抛光 铣磨成型 

分 类 号：TH706[机械工程—仪器科学与技术] TG580.6[机械工程—精密仪器及机械]