新型激光二极管列阵光束整形方法  

Novel Beam-Shaping Method for LDA

作　　者：吴芃[1] 王翠鸾[1] 韩淋[1] 刘媛媛[1] 李伟[1] 冯小明[1] 刘素平[1] 马骁宇[1] 

机构地区：[1]中国科学院半导体研究所,北京100083

出　　处：《半导体技术》2010年第1期50-53,共4页Semiconductor Technology

基　　金：国家自然科学基金资助项目(60576041)

摘　　要：设计并制作了一套简单有效的光束整形系统,用以改善激光二极管列阵器件(LDA)的光束质量,减小快慢轴光束质量积的差别,实现高亮度光纤耦合输出。首先采用快慢轴准直透镜压缩LDA的发散角,然后采用双面分区镀膜的单片平面镜,通过反射和折射将压缩后的LDA慢轴方向的光束分为7束,并将7束子光束在快轴方向重新排列,实验测得整形装置的效率为95.2%。该整形系统设计简单,效率高,具有很高的应用价值。In order to change LDA output beam into a style which can be coupled with small core radius fiber, a simple but efficient system was designed. A fast and slow axis collimation module was used to collimate the output beam from LDA, after that a plant mirror with both sides coated in special area was used to divide the beam into 7 sub-beam in slow-axis direction and reordered in fast-axis direction. After beam shaping process, the quality of the LDA output （400μm, 0.22） , and the whole beam shaping beam are improved a lot which can be focused into fiber set efficiency is 95.2 %.

关 键 词：半导体激光器 光束整形 双面分区镀膜的平面反射镜 高亮度 

分 类 号：TN248[电子电信—物理电子学]