以硅纳米孔柱阵列为模板制备金纳米薄膜  

Preparation of Au Nanometer Thin Film Using Silicon Nanoporous Array as Template

作　　者：富笑男[1] 符建华[1] 李坤[1] 罗艳伟[1] 李新建[2] 

机构地区：[1]河南工业大学理学院,郑州450001 [2]郑州大学物理系材料物理教育部重点实验室,郑州450052

出　　处：《人工晶体学报》2009年第6期1467-1471,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金(No.10574112);河南省教育厅自然科学基金(No.2007140003);河南工业大学科研基金(07XJC010);河南工业大学博士基金(2007BS009)

摘　　要：采用浸渍技术,分别以新鲜和老化两组硅纳米孔柱阵列(Si-NPA)衬底为模板制备了不同形貌特征的Au/Si-NPA。结果表明:造成两组衬底上形成的Au/Si-NPA形貌上的巨大差异主要是由于两组Si-NPA衬底表面氧含量的分布不同所致。进一步分析发现,Si-NPA在Au/Si-NPA的形成过程中既起到了模板作用,又起到了还原的双重作用。由于Si-NPA具有规则的阵列结构,从而使得金在Si-NPA表面上的沉积速率产生选择性,最终可以形成准周期的、规则的金纳米复合薄膜。The Au/Si-NPA samples with different morphologies were fabricated experimentally by immersion technique using fresh and aged silicon nanoporous pillar array （Si-NPA）substrates as template. The results show that the differences between morphologies of the Au/Si-NPAs which were prepared on two kinds of substrates are due to the differences of oxygen quantities distributing on the surface of the Si-NPA substrates. The further studies show that the Si-NPA present two functionalities during fabricating of the Au/Si-NPA. One is as the reductant and another the template. The Si-NPA regular array structure leads to the velocity dependence of Au deposition on the local geometrical features of the Si-NPA surface. Finally, the quasi-periodical, regular Au nanocomposite thin film has been formed.

关 键 词：硅纳米孔柱阵列 模板 选择沉积 金纳米复合薄膜 

分 类 号：O484[理学—固体物理]