紫外光辐照Bi_(4-x)Nd_xTi_3O_(12)薄膜制备工艺  

Synthesis of Bi_(4-x)Nd_xTi_3O_(12) Thin Film by UV-Light Irradiation

作　　者：肖立华[1] 王文[1] 孟庆昌[1] 柯华[1] 贾德昌[1] 周玉[1] 

机构地区：[1]哈尔滨工业大学,黑龙江哈尔滨150001

出　　处：《稀有金属材料与工程》2009年第A02期279-281,共3页Rare Metal Materials and Engineering

基　　金：国家自然科学基金资助(50502013);黑龙江省青年基金(QC05C06);哈尔滨工业大学创新团队

摘　　要：以Pt(111)/Ti/SiO2/Si为基片,采用溶胶凝胶法,通过紫外光辐照钕掺杂钛酸铋(Bi4-xNdxTi3O12,x=0.25,0.75)胶体,分别采用电泳沉积和甩胶沉积制备薄膜,并对比了制备的薄膜质量。通过差热-热重分析(DSC-TG)、X射线衍射(XRD)、原子力显微镜(AFM)等技术手段对Sol-Gel法制备的BNT薄膜进行了表征。研究结果表明,经紫外光辐照和电泳沉积制备的Bi4-xNdxTi3O12(x=0.25,0.75)薄膜于300℃煅烧有机物,500℃随炉热处理,可得到均匀致密且(117)择优取向的钙钛矿相BNT薄膜。The films of neodymium-doped Bi4Ti3O12（Bi4-xNdxTi3O12, x=0.25, 0.75, BNT） were synthesized by sol-gel using UV-light irradiation on Pt（111）/Ti/SiO2/Si substrate, then they were investigated by differential scanning calorimetry-thermogravimetry （DSC-TG）, atomic force microscope（AFM） and X-ray diffraction （XRD） technology. The results show that the BNT thin films are uniform and dense. After thin films were deposited using electrophoresis and UV-irradiation, annealed at 300 ℃, and then crystallized at 500 ℃ for 30 min, pure perovskite phases were obtained. XRD indicated that BNT thin film had （117） predominate orientation.

关 键 词：Bi4-xNdxTi3O12薄膜 溶胶-凝胶 紫外光辐照 

分 类 号：TB383.2[一般工业技术—材料科学与工程]