三光束飞秒激光干涉在GaP，ZnSe表面诱导二维复合纳米-微米周期结构  

Two-dimensional complex nano-micro patterning on GaP and ZnSe surface created by the interference of three femtosecond laser beams

作　　者：熊平新[1] 贾鑫[1] 贾天卿[1] 邓莉[1] 冯东海[1] 孙真荣[1] 徐至展[1] 

机构地区：[1]精密光谱科学与技术国家重点实验室、华东师范大学物理系,上海200062

出　　处：《物理学报》2010年第1期311-316,共6页Acta Physica Sinica

基　　金：国家重点基础研究发展计划(批准号:2006CB806006和2006CB921105);上海市曙光学者项目(批准号:07SG25);浦江人才项目研究经费(批准号:P060405);教育部新世纪人才计划和创新团队(批准号:NCET-04-0420);博士点基金(批准号:20050269011);上海市科学技术委员会项目(批准号:08JC1408400,06DJ14008和06QH14003)资助的课题~~

摘　　要：报道了三光束飞秒激光干涉在GaP和ZnSe晶体表面诱导二维复合纳米-微米周期结构.改变三束光的偏振组合方式,可以得到不同的纳米-微米复合结构.理论计算了相应偏振条件下光场强度分布、椭偏度分布和偏振方向分布.实验和理论计算结果表明,烧蚀斑上的微米长周期结构是由三光束干涉的强度花样决定,短周期纳米结构是由光场的偏振干涉花样决定.这些研究在纳米材料制备、超高密度光存储以及材料特性周期性调制等方面有很大的应用前景.In this paper, we reported the two-dimensional periodic nano-micro complex structures on GaP and ZnSe crystals surface created by the interference of three femtosecond laser beams. Different types of nano-patterns were obtained by arranging the laser polarization combination of the three beams. In order to understand the formation of these nanopatterns, we theoretically calculated the distributions of laser intensity and polarization. The experimental and theoretical results indicate that the long periodic microsturctures are determined by the interferential intensity pattern, and the short periodic nanostruetures were determined by the interferential polarization pattern. These researches haue huge potential applications in nanopattering of semiconductors and dielectrics.

关 键 词：纳米周期结构 飞秒激光 多光束干涉 半导体 

分 类 号：O436[机械工程—光学工程]