基于压电聚合物薄膜可调谐Fabry-Perot滤波器的研究  

Study of tunable Fabry-Perot filter based on piezoelectric polymer film

作　　者：周可余[1] 叶辉[1] 甄红宇[1] 尹伊[1] 沈伟东[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,杭州310027

出　　处：《物理学报》2010年第1期365-369,共5页Acta Physica Sinica

基　　金：浙江省教育厅2008项目(批准号:Y200803562)资助的课题~~

摘　　要：采用DBR/电极/间隔层/电极/DBR的结构形式制作滤波器,器件透光部分刻蚀以消除电光效应.测试滤波器透过率光谱,并通过加电压对滤波器中心波长进行调制.据实际结果得到腔的光学厚度为8.04μm,腔长在电场作用下收缩.在140V电压下,腔长收缩量约为0.757%.实验证明电致伸缩效应在调制中起作用.Tunable Fabry-Perot filter （FPF） has high practical value in optic communications. Piezoelectric copolymer P（VDF-TrFE） can be used as spacer material in FPF to obtain large tunability in wide range because of its great electrostrictive effect. The filter has been fabricated with the structure of DBR/electrode/spacer/electrode/DBR. The copolymer is partly etched at where the light traverses. The transmittance spectra have been studied. The resonant wavelengths have been modulated by applied voltage. The optical length is measured to be 8.04 tLm, which shrinks under the electric field. The filter exhibits a total optical path-length change of - 0. 757 % under an electric field of 140 V. The results indicate that the electrostrictive effect plays a major role.

关 键 词：Fabry—Perot滤波器 聚合物 可调谐 电致伸缩 

分 类 号：TN713[电子电信—电路与系统]