Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laser and matched photopolymer  

作　　者：朱腾飞 谭炳辉 潘雪丰 陶卫东 

机构地区：[1]College of Science,Ningbo University

出　　处：《Chinese Physics B》2010年第1期388-392,共5页中国物理B（英文版）

基　　金：Projiect supported by the National Key Basic Research Special Fund of China (Grant No. 2004CB719805);the Ningbo Natural Science Foundation, China (Grant No. 2009A610011)

摘　　要：2D and 3D submicron periodic structures are first fabricated by red-induced photopolymerization using a common 635 nm semiconductor laser and specially developed red-sensitive polymer material. The principle of this new photo- polymer material fabrication is explained and the absorption spectra of the material are measured. This fabrication technique allows a deeper penetration into volume and larger interference irradiation area which is more than 1 cm2. The optical design, theoretical calculations and experimental results including diffraction patterns verifying the forma- tion of periodic structures are presented. Compared with other fabrication technologies using high-power lasers, this approach has greatly reduced the demand for laser apparatus. Therefore, it is much more accessible to most. laboratories and potentially usable in holographic fabrication of photonic crystals and devices in micro electro-mechanical systems （MEMS）.2D and 3D submicron periodic structures are first fabricated by red-induced photopolymerization using a common 635 nm semiconductor laser and specially developed red-sensitive polymer material. The principle of this new photo- polymer material fabrication is explained and the absorption spectra of the material are measured. This fabrication technique allows a deeper penetration into volume and larger interference irradiation area which is more than 1 cm2. The optical design, theoretical calculations and experimental results including diffraction patterns verifying the forma- tion of periodic structures are presented. Compared with other fabrication technologies using high-power lasers, this approach has greatly reduced the demand for laser apparatus. Therefore, it is much more accessible to most. laboratories and potentially usable in holographic fabrication of photonic crystals and devices in micro electro-mechanical systems （MEMS）.

关 键 词：submicron periodic-structures holographic fabrication red sensitive polymer redincuced polymerization 

分 类 号：TN249[电子电信—物理电子学]