高精度半导体硅片电阻率测量系统设计与实现  

Design and Implementation of a New High Precision Semiconductor Resistivity Measure System

作　　者：汪鹏[1] 孙以材[1] 谢莉莉[2] 田丰[1] 

机构地区：[1]河北工业大学信息工程学院,天津300401 [2]天津职业大学电子信息工程学院,天津300410

出　　处：《河北工业大学学报》2009年第6期57-61,共5页Journal of Hebei University of Technology

摘　　要：提出一种新的硅片电阻率均匀性测量方法.介绍了电阻率测量系统的各部分构成,主要包括多路选择开关、恒流源以及A/D转换电路.系统以单片机为核心,控制测量过程,并将采集到的数据传给上位机.给出了模数转换控制芯片AD7715的主要参数,设计了初始化及读数据流程图.描述了AD7715在测量系统中的电路连接.该系统具有精度高,恒流源可调等特点.最后简要介绍了一种成像方法,对测量结果进行了讨论.A new method is described for resistivity distribution of semiconductor wafers, This paper introduces the data collect system mainly including multiplexers, precision constant current source and analog to digital converter circuit. The system uses MCU to control the measure process, and transmits collected data to the computer. AD7715 is used as AD converter and it＇ s flowchart for setting up and reading is given. System has the characteristic of high precision and can using a variety of collection methods. Finally, this paper briefly introduces a method of image rebuild and the measurement results are discussed.

关 键 词：半导体电阻率 电阻抗成像 数据采集 单片机系统 反投影重建 

分 类 号：TN307[电子电信—物理电子学]