光纤MEMS法布里-珀罗压力传感器的准分布式测量  

Quasi-Distributed Measurement of Optical Fiber MEMS Fabry-Perot Pressure Sensors

作　　者：倪小琦[1] 王鸣[1] 陈绪兴[1] 戴霞娟[1] 

机构地区：[1]南京师范大学物理科学与技术学院,江苏南京210097

出　　处：《南京师范大学学报（工程技术版）》2009年第4期82-86,共5页Journal of Nanjing Normal University(Engineering and Technology Edition)

基　　金：江苏省科技支撑计划(工业部分)(BE2008138)资助项目

摘　　要：提出了一种基于傅立叶解调法的空分复用系统,实现了光纤微机电系统(M icroE lectroM echan ical System,MEMS)法-珀(FP)压力传感器的准分布式测量.传感器基于FP腔干涉的原理,采用MEMS技术加工制作,用傅立叶方法解调干涉信号,用光开关实现传感器复用.理论分析与实验验证了传感器解调和复用的基本原理.结果表明,该系统具有好的线性、灵敏度、精度和重复性,响应速度快,复用的传感器间无明显串扰,系统复用能力取决于光开关的通道数.A muhiplexing scheme based on Fourier demodulation method is presented in this paper, which makes quasidistributed measurement of optical fiber MEMS Fabry-Perot （FP） pressure sensors possible. Based on FP interferometry, the sensors are fabricated by employing the microelectromechanical system （MEMS） techniques and interrogated with Fourier demodulation method. An optical switch is used to multiplex the sensors. The demodulation and multiplexing principle are theoretically analyzed and experimentally verified. The experimental results demonstrate that the system has reasonable linearity, sensitivity, precision, repetition and fast response. There is no observable crosstalk among the muhiplexing sensors and the system＇ s capacity depends on channels of the optical switch.

关 键 词：导波与光纤光学 FP压力传感器 傅立叶解调法 准分布式测量 

分 类 号：TN253[电子电信—物理电子学]