视网膜前假体中柔性凸起微电极的研制  

Fabrication of Flexible Convex-Shaped Microelectrodes for Epiretinal Prostheses

作　　者：邢玉梅[1,2,3] 惠春[1] 李刚[4] 赵建龙[4] 

机构地区：[1]上海交通大学生命科学技术学院,上海200240 [2]上海交通大学微纳科学技术研究院,上海200240 [3]上海大学纳微能源研究所,上海200444 [4]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《纳米技术与精密工程》2010年第1期25-30,共6页Nanotechnology and Precision Engineering

基　　金：国家重点基础研究发展计划"973"资助项目(2005CB724305;2005CB724302);中国博士后科学基金资助项目(20070410724);上海市纳米专项(0852nm01700);上海市科委国际合作专项(8160706000);科技部国际合作项目(2009DFB60160)

摘　　要：采用聚对二甲苯(Parylene C)作为结构材料,借助微细加工技术设计并制作了按6×6矩阵排布的柔性凸起微电极阵列.微电极直径为80μm,引线线宽40μm,电极间距为280μm,引线间距为80μm.电极位点高度约为10μm,呈明显的圆滑凸起结构特征.电极和引线表面均平整光滑,轮廓清晰,结构完好.阻抗测试结果表明:随着频率的增加,凸起微电极的阻抗呈下降趋势,显示出明显的高通特性;1 kHz时凸起微电极的阻抗约为10 kΩ,较具有相同基底面积的平面电极约低30%,有助于提高电极的信噪比,可望用于视网膜前假体中.柔性凸起微电极制作工艺简单,利于高效率批量制作并提高微电极的集成度.By means of microfabrication technology, an array of 6 × 6 flexible convex-shaped microelectrodes was designed and fabricated with Parylene C as the bulk material, in which the diameter of Parylene based flexible convex-shaped microelectrode is 80μm, the width of metal traces is 40 μm, the spacing of electrode is 280 μm and the pitch between metal traces is 80 μm. The single electrode is about 10 μm in height with an apparent protruding feature. The surface of electrode and trace is smooth and intact with a distinct outline. Impedance measurement results show that the impedance of the flexible convex-shaped microelectrode decreased dramatically with the increase of frequency, indicating a high-pass feature. The impedance of the microelectrode was 10 kΩ at 1 kHz, about 30% lower than that of the planar electrode with the same base surface area, which helps to raise the signal-to-noise ratio so that it can be used in epiretinal prostheses. The fabrication technique of the flexible convex-shaped microelectrode is simple,favorable to realize high-efficiency batch fabrication and to enhance the integration level of microelectrode.

关 键 词：视觉修复 视网膜假体 神经刺激 柔性微电极 微细加工 

分 类 号：R318.0[医药卫生—生物医学工程]