溶胶-凝胶法制备钛酸钡薄膜过程中溶剂的选择  

The Choice of Solvent in the Process of Preparing BaTiO_3 Thin Films by Sol-Gel Method

作　　者：杨芙丽[1] 崔一强[1] 陈洪利[1] 张雪梅[1] 刘军[1] 池利民[1] 

机构地区：[1]河北化工医药职业技术学院,河北石家庄050026

出　　处：《河北化工》2010年第2期27-29,共3页Hebei Chemical Industry

基　　金：河北省教育厅自然科学指导性研究课题(Z2005350)

摘　　要：合成透明稳定的溶胶对于制备优异电性能的BaTiO(3BT)薄膜是尤为关键的一步。以无水乙醇、异丙醇、乙二醇和乙二醇甲醚4种溶剂做对比,从合成溶胶的稳定性、表面张力以及制备出的BaTiO3薄膜的SEM等几方面比较了4种溶剂的优缺点,最后以乙二醇甲醚合成的溶胶最清晰、稳定,用此溶胶在Si(100)基底上得到了均匀无开裂的钛酸钡薄膜。Synthesizing transparent and stable sol for BS thin film is a very important step based on many literatures. With alcohol, isopropanol, ethylene glycol and ethylene glycol monomethyl four solvent for comparison to synthesize sol. And compre their merits from the sol stabilization, surface tension and SEM BaTiO3 film. The morphology of the films prepared by four kind of precursor sol was also discussed. The optimum condition is got here. The results show that the films that were acquired in ethylene glycol monomethyl ether solvent were proper and they may roll out well-proportioned on the Si（100） substrate.

关 键 词：BaTiO3薄膜 溶胶-凝胶法 溶剂 选择 表面张力 

分 类 号：O648.16[理学—物理化学]