Ti-O薄膜中O含量对紫外光-可见光吸收的影响  

Absorption UV and Visible Spectrum of Ti-O Films Affected by O Content

作　　者：万维威[1] 何翔[1] 孙奉娄[1] 

机构地区：[1]中南民族大学,武汉430074

出　　处：《表面技术》2010年第1期45-47,共3页Surface Technology

基　　金：武汉市重点科技攻关计划项目(200761023420)

摘　　要：应用射频磁控溅射技术在普通载玻片上镀制一层均匀的Ti-O薄膜,采用红外光谱仪对其进行红外吸收光谱分析,采用紫外光-可见光分光光度计测量其吸光度,得到了在不同O含量条件下制备的Ti-O薄膜对紫外光-可见光的吸收情况,并进行了比较。实验结果表明:随着O含量的逐渐减少,Ti-O薄膜的结构从TiO2逐渐转变为多种Ti-O结构共存,并且其吸收峰出现红移现象。The Ti-O films were coated on common glasses by RF magnetron sputtering technique. The absorption infrared spectrums of the Ti-O films were analyzed by infrared spectrometer. The absorbances of the Ti-O films were measured by uv-vis spectrophotometer, so we obtained and compared the absorption UV and visible spectrum of the Ti- O films with different oxygen content. The experiment results show that while the oxygen content decreases the compositions of the films are changed from TiO2 to different structures of Ti-O and the absorption spectrum red-shifted of the Ti-O films happens.

关 键 词：Ti—O薄膜 射频磁控溅射 禁带宽度 红移 

分 类 号：O484.4[理学—固体物理]