基于硅模具的Zr基非晶合金微成形工艺研究  

Study on Micro-forming Process of Zr-based Bulk Metallic Glass with Silicon Mold

作　　者：王栋[1] 廖广兰[1] 潘杰[2] 彭平[1] 柳林[2] 史铁林[3] 

机构地区：[1]华中科技大学数字化装备与制造国家重点实验室,武汉430074 [2]华中科技大学材料成形与模具技术国家重点实验室,武汉430074 [3]武汉光电国家实验室(筹),武汉430074

出　　处：《中国机械工程》2010年第2期222-225,共4页China Mechanical Engineering

基　　金：国家重点基础研究发展计划资助项目(2009CB724204);国家自然科学基金资助项目(50775091)

摘　　要：研究了利用硅模具进行微成形的热压工艺,针对超塑性成形Zr65Cu17.5Al10Ni7.5非晶合金微零件过程进行分析,提出精确去除非晶合金飞边的方法,并采用质量分数为40%的KOH溶液(温度为80℃)腐蚀去除硅模具得到微型零件。利用该工艺成功制备出尺寸精度很高、模数为0.1mm、齿数为20、厚度为300μm的非晶态微型直齿圆柱齿轮。该工艺用于制备高性能非晶合金微型零件优势明显,尤其对于芯部是复杂结构的微型零件更具成形优势。Micro--forming hot embossing process with silicon mold was studied, and superplastic micro--forming of Zr65 Cu17.5 All0 Ni7.5 bulk metallic glass micro--parts was analyzed. Mechanical grinding was put forward to accurately remove the flashes of bulk metallic glass micro--parts. The micro--parts with silicon mold were then dipped into potassium hydroxide solution at 80℃ to dissolve the mold and obtain the others. The process is utilizd and a good dimensional accuracy for an amorphous micro--spur gear with 0.1 module,20 teeth and 300 micrometers in thickness is obtained. It follows from the results that the technology is promising for manufacturing high--performance complex micro amorphous components especially for those with complex structure in the core.

关 键 词：非晶合金 微成形 硅模具 微齿轮 

分 类 号：TB302.5[一般工业技术—材料科学与工程]