光子晶体波导对垂直腔面发射激光器光束远场形貌的调控  

Control of the photonic crystal waveguide over the beam profile of vertical-cavity surface-emitting lasers

作　　者：刘安金[1] 邢名欣[1] 渠红伟[1] 陈微[1] 周文君[1] 郑婉华[1] 

机构地区：[1]中国科学院半导体研究所纳米光电子实验室,北京100083

出　　处：《物理学报》2010年第2期1035-1039,共5页Acta Physica Sinica

基　　金：国家重点基础研究发展计划特别基金(批准号:2006CB921700);国家自然科学基金(批准号:10634080;60677046;60838003);国家高技术研究发展计划(批准号:2006AA03Z403)资助的课题~~

摘　　要：研究了光子晶体波导对垂直腔面发射激光器(VCSEL)光束远场形貌的调控.采用三层对称平板波导模型分析了影响光子晶体VCSEL(PC-VCSEL)远场发散角的参数.研究表明,PC-VCSEL中光子晶体的填充比(空气孔直径和光子晶体周期的比值)以及空气孔的刻蚀深度控制了光束的发散角,低填充比和浅刻蚀的PC-VCSEL有利于获得低发散角的光束.设计并制作了两种不同结构参数的PC-VCSEL,这两种器件中光子晶体的填充比和空气孔的刻蚀深度不同.实验结果表明,低填充比和浅刻蚀的PC-VCSEL的发散角更低,与理论分析符合得很好.The control of the photonic crystal waveguide over the beam profile of vertical-cavity surface-emitting lasers is investigated. The symmetric slab waveguide model is adopted to analyze the control parameters of the beam profile in the photonic-crystal vertical-cavity surface-emitting laser （PC-VCSEL）. The filling factor （the ratio of the hole diameter to the lattice constant） and the etching depth control the divergence angle of the PC-VCSEL, and the low filling factor and the shallow etching depth are beneficial to achieve the low-divergence-angle beam. Two types of PC-VCSELs with different filling factors and etching depths are designed and fabricated. The experimental results show that the device with a lower filling factor and a shallower etching depth has a lower divergence angle, which agrees well with the theoretical predictions.

关 键 词：光子晶体波导 垂直腔面发射激光器 发散角 

分 类 号：TN248[电子电信—物理电子学]