氮离子束辅助电弧离子镀对TiN膜层中金属“大颗粒”影响的研究  

Effect of Ion Beam Bombardment Assisted Arc Ion Plating on Metal 'Large Particles' in TiN Coatings

作　　者：吕树国[1,2] 刘常升[1] 张罡[2] 毕监智[2] 金光[2] 李玉海[2] 

机构地区：[1]东北大学材料与冶金学院,辽宁沈阳110004 [2]沈阳理工大学中俄联合高能束流实验室,辽宁沈阳110168

出　　处：《钢铁研究学报》2010年第1期22-25,共4页Journal of Iron and Steel Research

基　　金：科技部国际合作重点项目(2004DFA4800)

摘　　要：采用俄罗斯UVN 0.5D2I离子束辅助电弧离子镀沉积设备,在高速钢W18Cr4V基材上沉积TiN膜层。研究了N离子束轰击能量对膜层表面形貌、相结构、显微硬度的影响。结果表明:N离子束辅助轰击,能够有效地减少和降低膜层表面"大颗粒"的数量和尺寸,消除了膜层中较软Ti2N相,得到了单一的TiN相。随着轰击能量的增加,TiN相结构不发生改变,TiN(111)取向逐渐减弱,而(200)取向逐渐增强。N离子束辅助轰击能量的增加,提高了膜层的显微硬度。TiN coatings were deposited on high-speed steel W18Cr4V substrate by Russia UVN 0.5D2I ion beam assisted arc ion plating.The effects of N ion beam bombarding on surface morphology,phase structure and micro hardness of deposited coatings were studied by change the energy of N ion beam bombarded.The experimental results show that the size and the amount of large particles on coatings surface was decreased obviously,and unitary TiN phase was obtained and softer Ti2N phases were eliminated by N ion beam assisted bombard.As the energy of bombard increased,the phase structure of TiN didn′t changed,however,TiN（111） crystal orientation gradually reduced,（200） gradually enhanced and the micro hardness of coatings reinforced too.

关 键 词：电弧离子镀 TIN膜层 离子束 大颗粒 

分 类 号：TG174.44[金属学及工艺—金属表面处理]