Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method  

作　　者：王少卿 王向朝 

机构地区：[1]Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences [2]Graduate University of the Chinese Academy of Sciences

出　　处：《Chinese Optics Letters》2010年第2期177-180,共4页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.60578051);the Key Basic Research Program of Science and Technology Commission of Shanghai Municipality(No. 07JC14056).

摘　　要：The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The lst-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum （FWHM） of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating （SPM） interferometer.The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The lst-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum （FWHM） of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating （SPM） interferometer.

关 键 词：INTERFEROMETERS Resonators 

分 类 号：TH744.3[机械工程—光学工程]