单晶Si材料表面碱织构实验研究  

Research on Monocrystalline Silicon Surface Etching

作　　者：陈刚[1] 马逊[1,2,3] 刘祖明[1,2,3] 廖华[1,2,3] 李景天[1,2,3] 刘剑虹[1,2,3] 

机构地区：[1]云南师范大学能源与环境科学学院,昆明650092 [2]教育部可再生能源材料先进技术与制备重点实验室,昆明650092 [3]云南省农村能源工程重点实验室,昆明650092

出　　处：《半导体技术》2010年第2期137-141,共5页Semiconductor Technology

基　　金：云南师范大学太阳能研究所省部级重点实验室和省级重点学科联合研究基金(KJ2008004)

摘　　要：在利用单晶Si材料制备太阳电池的过程中,通常利用碱溶液各向异性腐蚀的特性,在表面形成类似于"金字塔"的绒面结构,降低太阳电池表面反射,提高太阳电池的转换效率。实验采用固定反应温度以及反应时间,调整NaOH溶液的质量分数和无水乙醇的体积分数,通过测量不同实验条件下样品的表面反射率和观察扫描电镜图像,最终得到较好的单晶Si太阳电池表面织构条件。最后分析NaOH溶液的质量分数和无水乙醇的体积分数对表面织构的影响,同时给出测量表面减反射率结果。该结论对工业化单晶Si太阳电池表面织构的制备具有一定的指导意义。Alkaline solution is often used to etch surface of monocrystalline Si solar cell in order to increase efficiency. Usually the pyramids will he formed on the surface of Si wafers after etching, and these pyramids can trap the light and then reduce surface reflectivity. The conditions of surface etching by changing concentration of sodium hydroxide ＇（NaOH） and ethanol, fixing acting time and temperature were researched. The optimal conditions of the samples were found and observed by measuring surface reflectivity and SEM. The influence of sodium hydroxide and ethanol were analyzed by the results of surface reflectivity. The surface etching conditions are suitable for monocrystalline solar cells production.

关 键 词：太阳电池 金字塔 表面织构 表面反射率 

分 类 号：TK51[动力工程及工程热物理—热能工程]