Langmuir双探针诊断Ne辉光放电管电子密度  

Langmuir double-probe diagnostics of electronic density in Ne glow discharge plasma

作　　者：俞哲[1] 张芝涛[1] 赵建森[1] 

机构地区：[1]大连海事大学物理系,辽宁大连116026

出　　处：《物理实验》2010年第1期1-5,共5页Physics Experimentation

基　　金：国家自然科学基金资助项目(No.50877005);教育部新世纪优秀人才支持计划(No.NCET-05-0296);国家重点基础研究发展计划课题(No.2008CB417203)

摘　　要：应用Langmuir双探针诊断理论,对充有氖气的石英放电管中的辉光放电等离子体进行了诊断,通过实验测得伏安特性曲线,计算得出电子温度和电子密度,讨论了等离子体的宏观参量与电子温度和电子密度的关系.采用直径为0.1 mm的探针对等离子体进行诊断,不仅减小了对所测等离子体区域的扰动,而且减小了读取伏安特性曲线所带来的误差.Based on the theory of Langmuir double-probe diagnostics, parameters of Ne glow discharge plasma in quartz discharge tube are measured. Electron temperature and electron density are calculated according to the double-probe I/V characteristic curve, and the variations of electron temperature and electron density are analyzed as a function of macroscopic parameters. The probe with a diameter of 0.1 mm is applied to diagnose plasma in the experiment. The probe measurement not only weakens the disturbance of plasma, but also reduces the error resulting from the usage of doubleprobe I/V characteristic curve.

关 键 词：Langmuir双探针 等离子体诊断 电子密度 辉光放电 

分 类 号：O461.21[理学—电子物理学]