基于紫外光辐照改性自组装单层膜图案化表面的铁酸铋薄膜制备与表征  

PREPARATION AND CHARACTERIZATION OF BiFeO_3 THIN FILM BASED ON ULTRAVIOLET IRRADIATED IN THE MODIFICATION MICROPATTERNING SELF-ASSEMBLED MONOLAYER

作　　者：谈国强[1] 宋亚玉[1] 苗鸿雁[1] 博海洋[1] 夏傲[1] 

机构地区：[1]陕西科技大学,教育部轻化工助剂化学与技术重点实验室,西安710021

出　　处：《硅酸盐学报》2010年第2期215-220,共6页Journal of The Chinese Ceramic Society

基　　金：国家自然科学基金(50672055;50872077);国家科技支撑计划(2006BAF02A28);陕西科技大学研究生创新基金资助项目

摘　　要：采用自组装单层膜(self-assembled monolayers,SAMs)技术在玻璃基板表面制备了十八烷基三氯硅烷(octadecyltrichlorosilane,OTS)-SAMs,将OTS-SAMs基体在光掩膜覆盖下用紫外光进行刻蚀,得到含有亲水性和疏水性区域的模板,利用液相沉积法在OTS-SAMs模板表面制备了铁酸铋(BiFeO3)图案化薄膜。通过接触角仪、原子力显微镜、X射线衍射、扫描电镜、X射线能谱仪等测试手段对OTS膜和BiFeO3薄膜进行表征。结果表明:以OTS为模板利用液相沉积法制备出边缘轮廓清晰、粗糙度较小,与基板结合力较强,条纹宽度为10～20μm的BiFeO3图案化薄膜。Octadecyltrichlorosilane （OTS） monolayer on the hydroxylated glass substrate was prepared by self-assembled monolayer （SAMs） technique.The OTS-SAMs matrix on the glass substrate was exposed to the ultraviolet light through a photomask to form a pattern of hydrophilic and hydrophobic surfaces.The BiFeO3 pattern films were successfully prepared using the OTS-SAMs model with the pattern of hydrophilic and hydrophobic surfaces.The crystal phase composition,microstructure and topography of the BiFeO3 films were characterized by various techniques,including contact angle tester,atomic force microscopy,X-ray diffraction,scanning electron microscopy and energy disperse spectroscopy.The results indicate the BiFeO3 pattern films have distinct patterns,small line edge roughness,good adherence,and the deposited lines with a width of 10-20 μm.

关 键 词：自组装单层膜 紫外光 铁酸铋 图案化 

分 类 号：O614.233[理学—无机化学] O614.811[理学—化学]