一种改进型Stoilov算法相位测量轮廓术  

An Improved Method of Stoilov Algorithm Adapting to Phase Measuring Profilometry

作　　者：武迎春[1] 曹益平[1] 钟立俊[1] 

机构地区：[1]四川大学光电科学技术系,成都610064

出　　处：《光子学报》2010年第2期307-310,共4页Acta Photonica Sinica

基　　金：国家高技术研究发展计划(2007AA01Z333);国家重大专项(2009ZX02204-008);四川省学术和技术带头人培养基金(07GRC-01)资助

摘　　要：提出了一种采用主动控制相移量的改进型Stoilov算法,按主动设定的相移量事先设计好五幅完全等相移正弦光栅图,由计算机编程控制数字投影仪依次投影该五幅光栅至待测物体表面,并对应采集五帧变形条纹,用所设定的相移量直接替代Stoilov算法中由变形条纹图解算的相移量,提高了相位提取和三维重构准确度.实验结果表明,平均绝对误差优于0.07,均方差优于0.07.A new improved method based on active controlling of phase-shifting is proposed. Five frames of sinusoidal gratings with exactly the same known phase-shifting value are programmed actively. While the five gratings are projected to the measured object one by one,five frames of distorted fringes are captured by CCD camera synchronously. If the known phase-shifting value substitute for the phase-shifting value calculated from distorted fringes in Stoilovts algorithm,the accuracy of the 3D profile reconstruction may be improved obviously. The experiments show that the average absolute error is less than 0. 07, and the mean square error is less than 0.07.

关 键 词：信息光学 Stoilov算法 相位测量轮廓术 改进算法 相位展开 三维重构 

分 类 号：TN247[电子电信—物理电子学]