Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure  

作　　者：张云霄 潘教清 赵玲娟 朱洪亮 王圩 

机构地区：[1]Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083

出　　处：《Chinese Physics Letters》2010年第2期299-302,共4页中国物理快报（英文版）

摘　　要：A new evanescently coupled uni-traveling carrier photodiode （EC-UTC-PD） is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68 A/W at 1.55-μm without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large -1 dB vertical alignment tolerance of 2.5 μm are achieved.A new evanescently coupled uni-traveling carrier photodiode （EC-UTC-PD） is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68 A/W at 1.55-μm without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large -1 dB vertical alignment tolerance of 2.5 μm are achieved.

关 键 词：Chinese climate network complex systems small world community 

分 类 号：TN364.2[电子电信—物理电子学] TN252