Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays  

作　　者：管志强 罗刚 MONTELIUS Lars 徐红星 

机构地区：[1]Nanoscale Physics and Devices Laboratory, Institute of Physics, Chinese Academy of Sciences, Beijing 100190 [2]Division of Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund S-221 00, Sweden

出　　处：《Chinese Physics Letters》2010年第2期307-310,共4页中国物理快报（英文版）

摘　　要：Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The pull-in＇＇ effect in dc driving and the hard spring effect＇＇ in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high Q factor. The mass-spring lump model combined with Green＇s function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors.Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The pull-in＇＇ effect in dc driving and the hard spring effect＇＇ in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high Q factor. The mass-spring lump model combined with Green＇s function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors.

关 键 词：Electronics and devices Instrumentation and measurement Condensed matter: structural mechanical & thermal Nanoscale science and low-D systems 

分 类 号：TP271.9[自动化与计算机技术—检测技术与自动化装置] U471.1[自动化与计算机技术—控制科学与工程]