阴极电弧TiN膜层的观察检测和比较  

Observation Test and Comparison of Cathodic-Arc TiN Film

作　　者：董骐 田凯 胡中军 吴臻 

机构地区：[1]北京丹普表面技术有限公司,北京100096

出　　处：《中国表面工程》2010年第1期63-68,共6页China Surface Engineering

摘　　要：通过对TiN膜层上和膜层中微液滴的观测,探讨了微液滴对膜层和基底结合力产生的影响,并分析了划痕试验中微液滴破损和膜层剥落之间的关系。在丹普公司开发的AS700DTXB型计算机自动控制离子镀膜机上,通过调整镀膜工艺参数、控制微液滴的尺寸,明显改善了TiN膜层和基底(高速钢和模具钢)的结合力。采用不同的划痕仪检测临界载荷Lc2可以稳定在100N,或者更高;分析和探讨了膜基结合力国内外不同的检测判据和规范。根据实际测量中的经验积累和结果分析,提出了对国内测量标准的修改意见。Through observing of micro droplets on and inside TiN film, their effects on film and substrate adhesion are studied. Meanwhile, the relationship between micro droplet broken and flake peal off along scratch on the film is analyzed. With automation ion plating machine model AS700DTXB developed by ProChina Limited, through coating recipe modification to control micro droplet sizes, TiN film and substrate （high speed steel and mould steel） adhesion is to be clearly improved. Critical load （Lc2） can be stable at 100 N or higher with different scratch test instruments. In this paper different measurement criterions and norms of scratch test are studied. Based on the measurement practices and data analysisabove, a further modification on Chinese standard is proposed.

关 键 词：阴极电弧 TIN 微液滴 划痕仪 膜基结合力 临界载荷 

分 类 号：O484.5[理学—固体物理]