被动半刚性磨盘在平滑中频误差中的应用  

Research on mid-frequency errors smoothing with a passive semi-rigid lap

作　　者：汉语[1,2] 伍凡[1] 万勇建[1] 房凯[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院研究生院,北京100039

出　　处：《强激光与粒子束》2010年第2期319-322,共4页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(60808017)

摘　　要：介绍了一种去除中频误差的有效工具被动半刚性磨盘。被动半刚性磨盘由刚性基底、变形层、薄板层以及抛光层组成。这种特殊的夹层式结构使磨盘在平滑过程中具有高通滤波特性,因而能够有效去除中频误差。基于弹性力学和滤波器理论,分析了被动半钢性磨盘的平滑机理,讨论了磨盘基本参数和误差频率之间的相互关系。以一块表面具有明显中频误差的抛物面镜为实验件,对被动半刚性磨盘的平滑能力进行验证,经过2个周期(共计75 min)的平滑后,中频误差得到了有效抑制。Mast aspheric optical elements fabricated using computer controlled optical surfacing （CCOS） technology have mid-frequency errors on their surfaces. These errors come about because of the small tools removal characteristic and the misfit between rigid tools and aspheric surface. A passive semi-rigid tool, which can smooth ripple errors efficiently, is introduced in this paper. The tool is composed of a rigid layer, a compliant layer and a polishing layer. The passive tool works like a high-pass fil- ter, smoothing the ripple out without damaging the surface figure. The expression of polishing pressure under the lap is deduced based on elastic plate theory. The relationship between the basic parameters of the lap and error frequency is also discussed. To testify the smoothing ability of the passive lap, a 418 mm, f/2 concave paraboloidal mirror is fabricated with small rigid tools. After two cycles （75 min）, most of the mid-frequency errors are smoothed out.

关 键 词：光学加工 被动半刚性磨盘 应力分析 中频误差 非球面 

分 类 号：TQ171.6[化学工程—玻璃工业]