全方位离子注入与沉积类金刚石碳膜的结构与性能  

Microstructure and properties of DLC film synthesized by plasma immersion ion implantation and deposition technique

作　　者：刘洪喜[1] 蒋业华[1] 周荣[1] 汤宝寅[2] 

机构地区：[1]昆明理工大学机电工程学院,云南昆明650093 [2]哈尔滨工业大学现代焊接生产技术国家重点实验室,黑龙江哈尔滨150001

出　　处：《材料热处理学报》2010年第2期108-112,118,共6页Transactions of Materials and Heat Treatment

基　　金：国家自然科学基金项目(50671045);云南省自然基金项目(2008ZC021M);昆明理工大学分析测试基金(2009-022)

摘　　要：用等离子体浸没离子注入与沉积(PIIID)复合强化新技术在AISI440C不锈钢表面制备了类金刚石(DLC)碳膜。膜层表面的原子力显微镜(AFM)形貌显示出DLC膜结构致密均匀。Raman光谱分析结果表明,制备的DLC主要是由金刚石键(sp3)和石墨键(sp2)组成的混合无定形碳膜,且sp3键含量大于10%。以纯石墨棒做阴极,C2H2为工作气体条件下合成的DLC薄膜中,sp3键含量总体上较单纯用石墨作阴极而无工作气体条件下合成的DLC薄膜中sp3键含量高。与基体相比,薄膜试样的显微硬度和摩擦磨损性能均得到了较大改善,最大硬度提高88.7%,磨损寿命延长超过4倍。Microstructure and mechanical properties of diamond-like carbon（DLC） films synthesized by plasma immersion ion implantation and deposition（PIIID） on AISI440C stainless steel substrate were studied.Observation by atomic force microscope（AFM） reveals that the DLC film has extremely smooth surface,high uniformity and efficiency of space filling over large areas.Raman spectroscopy analysis indicates that PIIID diamond-like carbon consists of a mixture of amorphous carbon and crystalline phases, with a variable ratio of sp2/sp3 carbon bonds,and the content of sp3 bonds more than 10%.The microstructure of DLC film depends on the fabricating condition,implanting pulse width and working gas pressure.The sp3 bonds content of the DLC film synthesized by using graphite cathode combined with C_2H_2 gas is more than that of pure graphite cathode.Compared with the stainless steel substrate,Vickers hardness and friction and wear properties of the steel with PIIID diamond-like carbon film are improved obviously.The maximum Vickers hardness and wear life is increased by 88.7% and 4 times,respectively.

关 键 词：类金刚石碳膜(DLC) 等离子体浸没离子注入与沉积(PIIID) RAMAN光谱 AISI440C不锈钢 

分 类 号：TG174.44[金属学及工艺—金属表面处理]