SX-700单色器光栅正弦机构转角重复精度的模拟分析与测量  

Simulation analysis and measurement of rotation angle repeatability for grating sine mechanism of SX-700 monochromator

作　　者：吴坤[1,2] 薛松[1] 卢启鹏[3] 彭忠琦[3] 陈家华[1] 刘楷[1,2] 

机构地区：[1]中国科学院上海应用物理研究所,上海201800 [2]中国科学院研究生院,北京100049 [3]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《光学精密工程》2010年第1期45-51,共7页Optics and Precision Engineering

基　　金：国家大科学工程上海光源工程资助项目(No.SS-06;No.7093XQ070)

摘　　要：为了使上海光源(SSRF)研制的SX-700单色器的主要设计指标——波长扫描转角重复精度满足优于0.43″的要求,研究了单色器的波长扫描组件—光栅正弦机构的转角精度误差来源。设计单色器结构时,运用有限元分析软件AN-SYS对光栅正弦机构进行数值模拟计算,并根据模拟结果对光栅正弦机构的转角重复精度进行了误差分析,得到的转角重复精度为0.28″。依据分析结果制定了工程设计方案,并成功加工、装配了SX-700单色器。利用作者建立的一套由光电自准直仪组成的测试系统对光栅正弦机构的转角重复精度进行测试,实测精度为0.15″。结果表明,设计的SSRF的SX-700单色器光栅正弦机构的转角重复精度满足设计要求。To design a SX-700 monochromator for Shanghai Synchrotron Radiation Facility（SSRF）and to enable its main design index,the rotation angle repeatability of scanning photon energy,to be less than 0.43″,the error sources affecting the rotation angle repeatability of the grating sine mechanism are investigated and then the grating sine mechanism is simulated numerically by using the finite element software ANSYS.The errors for the rotation-angle-repeatability of the grating sine mechanism are analyzed according to the results of the numerical simulation,which shows that the rotation-angle-repeatability is 0.28″.Based on the analysis,a SX-700 monochromator is designed,and the angle repeatability of the grating sine mechanism is measured with an autocollimator system designed by us.Measured results indicate that the rotation angle repeatability of the designed monochromator is 0.15″,which meets the requirements of the grating sine mechanism for the rotation-angle-repeatability.

关 键 词：SX-700单色器 正弦机构 转角精度 数值模拟 

分 类 号：TH744.1[机械工程—光学工程]