NiZn铁氧体对叠层型薄膜变压器传输特性的改善  

Improvement of NiZn Ferrite Thin Film on Transmission Property of Stacked Thin-film Transformers

作　　者：郑梁[1] 秦会斌[1] 胡冀[1] 徐军明[1] 宋开新[1] 

机构地区：[1]杭州电子科技大学新型电子器件与应用研究所,杭州310018

出　　处：《微波学报》2010年第1期69-71,86,共4页Journal of Microwaves

基　　金：国家自然科学基金(60601022;60671024);浙江省自然科学基金(Y107255)

摘　　要：展示了一种新型的基于硅IC工艺的叠层型螺旋薄膜变压器,通过分析铁氧体的特性和磁谱,设计了薄膜变压器结构和制造工艺。采用光刻技术制备形状相同且完全叠合的初级与次级线圈,提高线圈耦合效率。空心变压器两层线圈之间采用SiO2作为绝缘层;磁芯变压器的两层线圈之间采用射频磁控溅射NiZn铁氧体薄膜作为绝缘层。在10MHz～20GHz的频率范围内分别对空心和磁芯叠层型螺旋薄膜变压器进行了测试,测试结果表明:磁芯薄膜变压器的带宽和传输效率都大于空心薄膜变压器;铁氧体薄膜能大幅度提高薄膜变压器的传输效率;匝数比为10∶10的磁芯薄膜变压器传输效率在频率9.85GHz时达到78.0%的最大传输效率。The stacked spiral thin-film transformer is designed and fabricated in this paper, . The mechanism of ferrite thin film is discussed. Primary spiral and secondary spiral are on the different layer and have the same shape. Air core transformer and magnetic core transformer are made with SiO2 or ferrite thin film between two spirals respectively. S-parameters are measured at 10MHz-20GHz. The result shows that the transmission efficiency and bandwidth of magnetic core thin- film transformer is better than those of air-core thin-film transformer. The ferrite film can improve the transmission efficiency of thin-film transformer. The transmission efficiency of magnetic core thin-film transformer with turn-number ratio 10：10 is more than 50% at 2.5GHz-2OGHz, and the maximum is up to 78.0% at 9.85GHz.

关 键 词：薄膜变压器 传输特性 铁氧体薄膜 

分 类 号：TM405[电气工程—电器]