提高CCD测量精度的方法研究  

Research on Methods of Improving CCD Measurement Accuracy

作　　者：王和顺[1] 陈次昌[2] 黄惟公[1] 

机构地区：[1]西华大学机械工程与自动化学院,成都610039 [2]西南石油大学机械工程学院,成都610500

出　　处：《半导体光电》2010年第1期136-139,共4页Semiconductor Optoelectronics

基　　金：国家自然科学基金资助项目(90410013)

摘　　要：为了大幅提高CCD的测量精度,提出了一种全新的CCD使用方法。该方法是将像素间距为H的CCD器件的像素行沿与被测边缘垂直方向成一定角度α来进行摆放。此时,单线阵CCD的最大测量误差减小为H×cosα,N个线阵CCD等距错排并以α角度斜放,最大测量误差将减小为(Hcosα)/N,当列间距为h的面阵CCD沿被测对象轴向斜放时,最大测量误差减小为h×sinα。分别采用单CCD和双CCD,对直径为5.000,8.000和12.000mm的三个标准杆件的直径进行了测量。结果表明,双CCD斜放,可获得更高的测量精度。该方法可从理论上彻底打破CCD像素间距的限制,并使CCD的测量精度大幅度地提高,进一步拓展CCD的应用范围。For obtaining higher CCD measurement accuracy, a new method is proposed. Several CCD are fit together by the distance of H1 = H/N with a certainty angle of a, H refers to the pixel pitch, and N is the number of linear CCD. By this means, the maximum error of single linear CCD is reduced to H× cos a, then that of multi-linear CCD is reduced to Hcos a/N, and that of plane CCD is reduced to h×sin a（h is the row space of plane CCD）. Three standard poles with respective diameter of 5. 000 mm, 8.000 mm and 12. 000 mm are measured with single CCD or two-inclined CCD seperately. The result shows that using two-inclined CCD gains higher accuracy. This method can avoid the restriction of pixel pitch theoretically, so higher measuring accuracy and wider applications of CCD will be achieved.

关 键 词：光学测量 高精度测量 CCD测量 像素间距 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术]