光热偏转成像实验  

Study on thermal wave imaging based on photo-thermal deflection technique

作　　者：侯庆军[1] 娄本浊[2] 李荣[1] 何军锋[2] 孙庆龙[2] 

机构地区：[1]滨州学院物理系,山东滨州256600 [2]陕西理工学院物理系,陕西汉中723003

出　　处：《物理实验》2010年第3期1-3,11,共4页Physics Experimentation

基　　金：滨州学院科研基金(No.BZXYQNLG200723)

摘　　要：概述了光热偏转成像原理,搭建了热波成像光热偏转自动化检测系统,并实现了数据采集和数据处理的自动化.利用该实验系统绘制了直线划痕SrBT样品和三角划痕硅片样品的表面光热偏转图,成像结果清晰直观.The theory of photo-thermal deflection detecting is introduced. A photo-thermal deflec- tion auto-detecting system for thermal wave imaging is designed and constructed, which can collect and process data automatically. The photo-thermal deflection pictures of the beeline nick for SrBT and the triangle nick for Si are taken by this system, which are fairly clear and intuitive.

关 键 词：光热偏转技术 热波成像 自动测量 

分 类 号：O432[机械工程—光学工程]