准分子激光对掺杂SnO_2气敏元件性能的影响  

The effect of excimer laser on properties of doping SnO 2 gas sensors

作　　者：王毓德[1] 周桢来[1] 文小明[1] 

机构地区：[1]云南大学

出　　处：《半导体光电》1998年第6期390-392,共3页Semiconductor Optoelectronics

基　　金：云南省国际合作项目

摘　　要：一定能量密度的准分子激光作用于掺杂ＳｎＯ２烧结型气敏元件敏感材料表面后，元件性能发生了显著的变化。元件电阻和对气体的灵敏度比作用前有明显的增加，同时材料表面颜色也发生了变化。分析认为该过程是由于短脉冲的准分子激光作用，使ＳｎＯ２材料快速升温熔化并快速冷凝重构，导致表面变性，从而引起材料电性能和气体敏感性能的变化。The properties of a doping SnO 2 sintered gas sensor change remarkably if the surface of its sensing material is irradiated by a certain amount of proper-fluence excimer laser.Sensor's resistance and sensitivity are improved while the color of its surface also changes.It is observed that the changes take place when the proper-fluence excimer laser pulse irradiates the surface of SnO 2 material because of the temperature increase.As a result,the thin layer of the irradiated area is melt rapidly and soon resolidified,which leads the variation of surface behavior,as well as electric and gas sensing properties.

关 键 词：准分子激光 气敏元件 二氧化锡 吸附氧 

分 类 号：TN379[电子电信—物理电子学] TN304.21