光纤光栅测头信号解调方法及实验研究  

Demodulation of Touch Trigger Probe Based on FBG with Experimental Study

作　　者：丁邦宙[1] 费业泰[1] 范哲光[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《应用科学学报》2010年第2期158-162,共5页Journal of Applied Sciences

基　　金：国家自然科学基金(No.50627501)资助

摘　　要：光纤布喇格光栅触发式测头是一种新型测头.传感信号解调是光纤光栅作为敏感元件应用于测头的关键技术之一.在光功率与波长漂移量函数关系的基础上,借助双频激光干涉仪、纳米级的微动平台对试制的测头进行FBG自解调实验.结果表明,研制的测头分辨率达到100nm,验证了光纤布喇格光栅应用于触发式测头的可行性.The touch trigger probe based on fiber Bragg gratings is a newly developed probe. With a sensing element used in a three-dimensional probe, sensor signal demodulation is a key technique. By means of the dual-frequency laser interferometcr and nano-level stage, the sampling probe is tested using a self-demodulation approach based on the functional relations between optical power and wavelength shift. Resolution of more than 100 nm can be achieved from the analysis of experimental data on a developed probe. Furthermore, experiments verify that application of FBG sensors in a three-dimensional probe is feasible.

关 键 词：计量学 触发式测头 光纤布喇格光栅 自解调法 触发原理 

分 类 号：TB96[机械工程—光学工程]