高功率轴快流CO_2激光器控制系统的研制  

Control system of a high power fast axial flow CO_2 laser

作　　者：李波[1] 王又青[1] 

机构地区：[1]华中科技大学光电子科学与工程学院,武汉430074

出　　处：《激光技术》2010年第2期285-288,共4页Laser Technology

基　　金：国家"十一五"科技支撑计划资助项目(2007BAF11B01)

摘　　要：为了提高高功率轴快流CO_2激光器的稳定性和智能化程度,以满足激光加工的需要,采用可编程逻辑控制器和尾镜取样功率稳定技术,研制出了以西门子可编程逻辑控制器为核心的高功率轴快流CO_2激光器控制系统,并在4kW轴快流CO_2激光器上进行了实验验证,取得了气压稳定度、功率稳定度、放电波形以及激光模式等实验数据,气压波动小于±50Pa,功率稳定度达到±0.1%,并可实现连续、脉冲、超脉冲放电。结果表明,该套控制系统可以满足高功率轴快流CO_2激光器的控制需求,提高了高功率轴快流CO_2激光器的稳定性和智能化程度。In order to improve the stability and intelligence of a fast axial flow （FAF） CO2 laser, a control system was developed with a SIEMENS S7-200 programmable logic controller adopted as the core and with laser power stabilized based on sampling the light from the rear mirror of the laser resonator. The structure and principle of each unit were described. The system was tested on a 4kW FAF CO2 laser. The curves of pressure stability, power stability, discharge wave, and the pattern of laser mode were acquired. The pressure fluctuation was less than ±50Pa, the power fluctuation was close to ±0. 1%. The continuous, pulsed and hyper-pulsed discharge could be achieved. The results show that the system can control a FAF CO2 laser well and its stability and intelligence are improved.

关 键 词：激光器 轴快流CO2激光器 控制系统 可编程逻辑控制器 尾镜取样 

分 类 号：TN248.2[电子电信—物理电子学]