提高CCD测量精度的方法研究  

Research the method to improve CCD measurement accuracy

作　　者：王和顺[1] 陈次昌[2] 黄惟公[1] 

机构地区：[1]西华大学机械工程与自动化学院,四川成都610039 [2]西南交通大学机械工程学院,四川成都610031

出　　处：《光电子．激光》2010年第1期63-65,共3页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(90410013);四川省教育厅青年基金项目(08202024);四川省教育厅重点资助项目(09202032)

摘　　要：提出一种大幅提高CCD的测量精度的方法。将像素间距为H的CCD器件像素行沿与被测边缘垂直方向成α角度摆放时,单线阵CCD的最大测量误差减小为Hcosα;N个线阵CCD等距错排并以α角度斜放,最大测量误差将减小为(Hcosα)/N;当列间距为h的面阵CCD沿被测对象轴向斜放时,最大测量误差减小为hsinα。分别采用单CCD和双CCD,对直径为5.000、8.000和12.000mm的3个标准杆件的直径进行了测量,结果表明,双CCD斜放可获得更高的测量精度。A new method is proposed to get higher measurement accuracy of CCD several CCD are fit together with the distance of H1=H/N,and inclined a certainty angle as α,H is pixel space-between,and N is CCD amount.By this means,the maximum error of single linear CCD is reduced to H×cosα that of multi-linear CCD is reduced to （Hcosα）/N,and that of plane CCD is reduced to h×sinα（h is row space-between of the plane CCD）.Three standard pole′s diameter is measured by single CCD and two-inclined CCD,these poles diameter are 5.000 mm,8.000 mm and 12.000 mm,respectively.The result shows that two-inclined CCD can gain high accuracy.

关 键 词：光学测量 高精度测量 CCD测量 像素间距 

分 类 号：TF391.41[冶金工程—冶金机械及自动化]