声表面波谐振型气体传感器的研究  

A Study of Surface Acoustic Wave Gas Sensor with Resonator Structure

作　　者：赵路明[1] 赵启大[2] 廖继平[2] 田爽[2] 吕福云[1] 

机构地区：[1]南开大学物理科学学院,天津300071 [2]南开大学现代光学研究所,天津300071

出　　处：《南开大学学报（自然科学版）》2010年第1期66-70,共5页Acta Scientiarum Naturalium Universitatis Nankaiensis

基　　金：国家自然科学基金(60572018);天津市科技发展计划(05YFGPGX04900);天津市科技支撑计划重点项目(07ZCKFGX00200)

摘　　要：分析和设计了声表面波谐振型气体传感器的叉指换能器和反射栅的最佳结构,研制了ST切石英基底的双端对声表面波谐振型气体传感器,研制了一种高稳定性的振荡器电路。用所研制的ST切石英基底,谐振频率148.5 MHz,敏感薄膜为酞菁铜的双端对声表面波谐振型气体传感器进行了NO_2气体传感检测实验,检测了传感器声表面波振幅的变化,其优点是传感器的声表面波振幅的温度波动远小于通常传感器所检测的声速,提高检测温度稳定性。实验结果证明了所研制的器件具有很好的实用性。A type of surface acoustic wave（SAW） resonator is analyzed and designed,the fundamental design feature of the interdigital transducer（IDT） electrode and reflector electrode is optimization.A two-port type surface acoustic wave gas sensor with resonator structure and a high stability oscillator circuit is fabricated.The NO2 gas measure experiment has been accomplished which used SAW resonator formed on an ST-cut quartz substrate and copper phthalocyanine thin films as sensitive layers at resonant frequency 148.5 MHz.In the experiment the amplitude of a surface acoustic wave has been monitored.The advantage is that the amplitude of a surface wave is much less sensitive to temperature fluctuations of the device than the customarily employed surface acoustic wave velocity.The experiment result proves the surface acoustic wave sensor can be well applied.

关 键 词：声表面波(SAW) 气体传感器 谐振器 薄膜 

分 类 号：TN65[电子电信—电路与系统]