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出 处:《高等学校化学学报》2010年第3期520-523,共4页Chemical Journal of Chinese Universities
基 金:深圳市容大电子材料有限公司资助
摘 要:对不同条件下合成的三羟基二苯甲酮酯化215感光剂进行高效液相色谱分析,确定了产物中各酯化产物的保留时间及其在产物中所占的积分峰面积比.通过分析,确认二酯化产物三乙胺盐是影响感光剂溶解度的主要原因.得到合成感光剂的最优条件:丙酮和水作溶剂的体积比为85∶15,三乙胺作催化剂.The esterify product of 2,3,4-trihydroxybenzophenone and 2,1-diazonaphthaquinone-5-sulfonyl chloride is widely used as the photoactive compound in photoresist.And its solubility is the critical factor in practical production.In this paper,several 2,3,4-trihydroxybenzophenone esterify 2,1-diazonaphthaquinone-5-sulfonyl chloride photoactive compounds were synthesized at different conditions and their solubility were different.High-pressure liquid chromatography was used to determine the retention time and integral area ratio of every esterified production.And through analyzing the stable configuration of photoactive compounds,the existence of triethylamine salt of diesterified product was thought to be the main factor that affects the solubility.Above all,the optimum synthetic condition of the photoactive compound is that acetone/water(85∶15,volume ratio) is applied as the solvent and Et3N is applied as the catalyst.
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